By A Mystery Man Writer
Electronics, Free Full-Text
Spacer FinFET: nanoscale double-gate CMOS technology for the
DTCO flow for air spacer generation and its impact on power and
What's Next For Transistors And Chiplets
Impact of MOL/BEOL Air-Spacer on Parasitic Capacitance and Circuit Performance at 3 nm Node
Figure 12 from Air spacer for 10nm FinFET CMOS and beyond
Spacer FinFET: nanoscale double-gate CMOS technology for the terabit era - ScienceDirect
Nanomaterials, Free Full-Text
Figure 2 from An air spacer technology for improving short-channel immunity of MOSFETs with raised source/drain and high-/spl kappa/ gate dielectric
A hybrid III–V tunnel FET and MOSFET technology platform integrated on silicon
Figure 4 from FinFET With Encased Air-Gap Spacers for High-Performance and Low-Energy Circuits