Laser drilling with a top-hat beam of micro-scale high aspect ratio holes in silicon nitride - ScienceDirect

Laser drilling with a top-hat beam of micro-scale high aspect ratio holes in silicon nitride - ScienceDirect

Laser drilling of alumina ceramic substrates: A review - ScienceDirect

Short Abstracts LiM 2011 - Wissenschaftliche Gesellschaft für

PDF) Laser Beam MicroMachining (LBMM) -A review

A review on laser drilling and cutting of silicon - ScienceDirect

PDF) Characterization of hole circularity and heat affected zone in pulsed CO2 laser drilling of alumina ceramics

A review on laser drilling and cutting of silicon - ScienceDirect

PDF) The Combination of Direct and Confined Laser Ablation Mechanisms for the Selective Structuring of Thin Silicon Nitride Layers

Laser Beam MicroMachining (LBMM) – A review - ScienceDirect